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Humiditive sensing properties of LiCl/SiO_2 porous thin films

Humiditive sensing properties of LiCl/SiO_2 porous thin films
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摘要 The development and investigation of humidity sensing materials is a very imporantbranch for research field of sensors and actuators. With respect to materials, the humiditysensors are usually classified into three kinds: electrolytes, polymers and porous ceramics.Lithium chlorite is a typical electrolyte as humiditive sensor and has been used
出处 《Chinese Science Bulletin》 SCIE EI CAS 1996年第8期688-691,共4页
基金 Project supported by the Opening Laboratory of Inorganic Functional Materials, Chinese Academy of Sciences.
关键词 SOL-GEL process THIN film humidity sensor RELATIVE humidity. sol-gel process, thin film, humidity sensor, relative humidity.
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