摘要
本文从不同角度分析了微探针的纵横比对ＳＴＭ成像的影响。首先，从振动力学角度分析了微探针的纵横比与其固有频率的关系，计算了不同形状的微探针的固有频率，提出了对纵横比的新的评价方法。最后，分析了微探针的纵横比对ＳＴＭ分辨率的影响。
In this paper,The relation between the microtip aspect ratio and its eigenfrequency is analyzed from the point of view of vibration mechanics, and the eigenfrequency of microtips with different forms are calculated. According to the above-mentioned discuss, A new evaluation method for aspect ratio is presented. Finally, the effect of microtip aspect ratio on the resolution of STM is discussed.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1996年第S1期174-176,176,共4页
Chinese Journal of Scientific Instrument
