摘要
ＮＵＭＥＲＩＣＡＬＳＩＭＵＬＡＴＩＯＮＦＯＲＭＥＡＳＵＲＩＮＧＹＩＥＬＤＳＴＲＥＮＧＴＨＯＦＴＨＩＮＭＥＴＡＬＦＩＬＭＢＹＮＡＮＯＩＮＤＥＮＴＡＴＩＯＮＭＥＴＨＯＤ①ＭａＤｅｊｕｎ，ＸｕＫｅｗｅｉ，ＨｅＪｉａｗｅｎＳｔａｔｅＫｅｙＬａｂｏｒａｔｏｒｙ...
The indentation process of aluminum film/silicon substrate combination by a rigid spherical indenter has been simulated using finite element method (FEM). It is demonstrated that both the yield strength and hardening index of the film affect the load displacement curve. An empirical relationship among the strength parameters and hardness of the film has been established from the FEM results. Utilizing the relationship and the hardness measured by nanoindentation test for two different indentation depths, the yield strength and plastic hardening index of the film can be estimated.
出处
《中国有色金属学会会刊：英文版》
EI
CSCD
1997年第3期66-69,共4页
Transactions of Nonferrous Metals Society of China
