摘要
TiB 2 and Ti B N films on various substrates were synthesized using ionized dc magnetron sputtering. A two turn coil powered by 13.56 MHz r.f. was used to enhance the ionization fraction of the plasma. The structure and properties of the films are affected by several parameters such as substrate bias, total pressure and nitrogen partial pressure and by the substrate materials. The crystallinity and the hardness of the films increase with decreasing total pressure. Well crystallized TiB 2 films with strong (0001) texture and with hardness up to 50 GPa were produced. Nitrogen doping into TiB 2 films decreases their crystallinity and hardness. About 1 GPa residual compressive stress was determined by a wafer curvature technique. It was performed that the dry friction of several different hard films against hardened 52100 steel, which showed the TiB 2 and Ti B N films existing the lowest friction coefficient and the lowest wear rate. [
TiB 2 and Ti B N films on various substrates were synthesized using ionized dc magnetron sputtering. A two turn coil powered by 13.56 MHz r.f. was used to enhance the ionization fraction of the plasma. The structure and properties of the films are affected by several parameters such as substrate bias, total pressure and nitrogen partial pressure and by the substrate materials. The crystallinity and the hardness of the films increase with decreasing total pressure. Well crystallized TiB 2 films with strong (0001) texture and with hardness up to 50 GPa were produced. Nitrogen doping into TiB 2 films decreases their crystallinity and hardness. About 1 GPa residual compressive stress was determined by a wafer curvature technique. It was performed that the dry friction of several different hard films against hardened 52100 steel, which showed the TiB 2 and Ti B N films existing the lowest friction coefficient and the lowest wear rate. [
出处
《中国有色金属学会会刊：英文版》
CSCD
2000年第5期619-624,共6页
Transactions of Nonferrous Metals Society of China
基金
Project(59971 0 2 1 )supportedbytheNationalNaturalScienceFoundationofChina
Project(97J0 2 8)supportedbytheNatu ralScienceFundo
