摘要
微机电系统是源于微电子加工技术,融合了微机械制造、传感、致动及微控制于一体的系统。微机电系统融合了力、电、流体、光、磁、热等多个物理域,随着建模与仿真技术的迅速发展,研究有关微机电系统建模与仿真的基本理论和方法。
MEMS originates from micro-electronics processing technology and integrates micro-mechanical manufacturing,sensing,actuation,and micro-control.The system covers a variety of physical fields such as force,power,flow,light,magnet,and heat.With the rapid development of model establishment and simulation technology,the article studies the basic theories and methods of MEMS model establishment simulation.
关键词
微机电系统
微机械动力学
仿真与建模
MEMS
micro-mechanical dynamics
simulation and model establishment
