摘要
在电子制造及其它一些高新技术行业,对设备的洁净度要求都非常高;以多晶硅提纯装置的清洁工程为实例,阐述了高洁净度设备清洗系统的工艺流程与操作方法。
In the electronic manufacturing and other high-tech area, the requirement of cleanliness is very high; this paper set an example of cleaning with Polysilicon purified equipment engineering,described the process and operating steps for the eleaning System with high cleanliness equipment.
出处
《工程质量》
2011年第9期66-68,共3页
Construction Quality
