摘要
运用混合溶胶-凝胶法制备了具有钛酸铅(PT)种子层的PZT基压电复合厚膜,包括(100)取向PZT压电厚膜,PZT纳米颗粒增强PZT压电复合厚膜((0-3)PZT)和氧化锌晶须增强PZT复合厚膜(ZnOw-PZT)。通过结构表征,研究了工艺条件和膜厚对PZT基厚膜的生长、结晶、取向和微结构的影响,给出最佳工艺条件。并介绍了无阀型压电MEMS微泵、V型阀式压电MEMS微泵、压电悬臂梁和三压电悬臂驱动的悬浮膜片式MEMS微镜等微器件的性能。
PZT-based thick films with lead titanate seed layer, including PZT, PZT thick films embedded with PZT nanopartieles and PZT thick films embedded with zinc oxide nanowhiskers （ZnO,,-PZT） are prepared by hybrid sol-gel route. The effects of process conditions and thickness on the crystalline orientation, micro-structure and surface morphology are investigated by structure characterized. The best technical conditions have been obtained. And the properties and feature of the valve-less PZT micro-pump, V type valve micro-actuator, MEMS silicon micro-cantilever and MEMS micro-mirror actuated by three piezoelectric cantilevers are introduced.
出处
《黑龙江大学工程学报》
2011年第3期76-84,共9页
Journal of Engineering of Heilongjiang University
基金
国家自然科学基金面上项目(50742007
50872159)
863项目(2007AA03Z103)
声纳与水声技术国防科技重点实验室基金项目(914C24KF0901)
