摘要
提高金刚石薄膜的表面质量和附着力是实现CVD金刚石涂层在耐磨器件领域中广泛应用的关键因素。本文通过优化沉积工艺参数,采用直拉丝化学气相沉积法在WC-Co硬质合金拉丝模内孔表面沉积金刚石薄膜。检测了该涂层的表面形貌、薄膜质量以及表面粗糙度,并把所制备的CVD金刚石薄膜涂层拉丝模具在拉拔铜线材生产线上进行了应用试验,结果表明:金刚石薄膜涂层拉丝模的工作寿命比传统硬质合金模具提高了40-50倍,并且拉制的铜线具有更好的尺寸精度和表面质量。
Improving the surface quality and the adhesion of diamond film is the key factors to realize CVD diamond coating widely applied in the wear-resistance parts field. Through optimizing deposition process parameters, this article uses the straight wiredrawing chemical vapor deposition to depose the diamond film in the hole surface of WC - Co carbide wiredrawing mould. The coating＇ s surface topography, film quality and surface roughness are detected and the preparation of CVD diamond film coated wire drawing mould in drawing copper wires production line is applied. The experimental results show that working life of diamond film coated wire drawing mould improved 40 - 50 times than traditional hard alloy mould, and the controlled copper wire has better pre cision and surface quality.
出处
《工具技术》
2011年第8期60-63,共4页
Tool Engineering
基金
福建省教育厅A类科技项目(JA10259)
