摘要
为了实现小口径干涉仪对大口径光学元件的低成本、高分辨力检测,可采用子孔径拼接方法。在对拼接算法进行改进的基础上,开发了拼接检测软件;建立了一套拼接检测系统,开展了大口径平面光学元件的子孔径拼接检测实验研究。利用9个60 mm×60 mm子孔径拼接来检测120 mm×120 mm的光学元件,检测结果表明:峰谷值误差为2.37%,均方根值误差仅为0.27%。
Sub-aperture stitching can be used to measure large aperture optical components with low cost and high resolution by a small aperture interferometer.A program based on the improved sub-aperture stitching algorithm was compiled,and the platform for sub-aperture stitching test was established.The experimental stitching that tested a 120 mm×120 mm optical component by nine 60 mm×60 mm planar sub-apertures was performed.The peak-valley error of test was 2.37% and the root-mean-square error was only 0.27%.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2011年第7期1831-1834,共4页
High Power Laser and Particle Beams
关键词
大口径光学元件
子孔径拼接
最小二乘法
光学检测
large aperture optical component
sub-aperture stitching
least-square method
optical test
