摘要
在半导体激光正弦相位调制干涉仪中，光源输出光强的变化是测量误差的主要来源。本文首次将光源波长的光热调制技术用于正弦相位调制干涉仪中，消除了因直接调制激光波长引起的光强度变化对测量的影响，降低了测量误差。
In sinusoidal phase modulating laser diode interferometer,the main error source is the variation in output light intensity of light source.The photo thermal modulation technique for light source wavelength is first applied to sinusoidal phase modulating interferometer,thus the influence of the variation in light intersity on measurement caused by the direct modulation of laser wavelength is eliminated and the measuring error is reduced.
出处
《光电工程》
CAS
CSCD
1999年第5期1-3,共3页
Opto-Electronic Engineering
基金
中国科学院百人计划
上海市应用材料研究与发展基金
关键词
半导体激光器
干涉仪
测量误差
Laser diodes,Photothermal effects,Interferometers,Measuring errors.
