摘要
着重介绍研制的两代电子散斑振动测量及其最新进展，并对纳米振动测量系统作详细介绍。该系统对振幅小于３０ ｎｍ 的振动能够进行全场测量，目前它是纳米全场振动测量的有效方法。
Itis im portantto m easure the am plitude and phase ofthe vibration ofan objectin industry and science. So researchers have invented m any vibration-m easuring system s, and each system has its ow n advantages. In this paper, tw o types ofthe system are introduced. The first type can m easure the vibration am plitude qualitatively. The second one can not only m easure the am plitude of the vibration quantitatively, but also can calculate out the phase of the vibration. The resolution of m easured am plitude is about 1 nanom eter. The system has the advantages ofhigh accuracy, fullfield, high speed and low price.
出处
《振动．测试与诊断》
EI
CSCD
1999年第4期339-342,共4页
Journal of Vibration,Measurement & Diagnosis
关键词
纳米
振动测量
全场测量
电子散斑
nanom eter vibration m easurem ent laser speckle fullfield m easurem ent
