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反射式超精密定位智能控制系统的研究 被引量:1

Research on intelligent control system with reflective ultra-precision positioning
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摘要 设计了一种基于反射激光莫尔信号的超精密定位装置,系统取反射的0次激光莫尔信号为控制信号,可实现高精度位置检测及超精密自动定位。针对反射式精密定位系统存在非线性,采用基于模糊神经网络的精密定位PID控制方法,利用模糊控制的模糊推理能力与神经网络的自学习能力,将模糊控制与RBF神经网络相结合在线(on line)调整PID控制参数,实现精密定位PID控制的自适应和智能化。实验结果表明,使用基于模糊神经网络的PID控制,控制响应快、稳定性好和鲁棒性强,可有效提高定位精度及定位速度,系统可获得±0.4μm的定位精度。 An ultra-precision positioning system based on reflective laser Moire signals is designed, k can achieve high-accuracy position detection and full automatic precision alignment using the reflective 0-th order Moire signals. In view of the existing non-linearity and the difficulty in obtaining a good performance by traditional PID control, a precision alignment PID control based fuzzy RBF neural network is proposed. This method utilizes the reasoning ability of fuzzy control and the study ability of neural net- work. Fuzzy control and RBF neural network are applied in order to adjust the parameters of PID online, so the self-adaptation and the intelligent PID control can come true. The experimental results show that the PID control based fuzzy RBF neural network has excellent control performance, such as, good stability and strong robustness. The positioning speed and positioning accuracy can be effectively improved. The device can achieve the positioning accuracy of±0. 4 μm.
出处 《光电子.激光》 EI CAS CSCD 北大核心 2011年第8期1203-1206,共4页 Journal of Optoelectronics·Laser
基金 国家"863"计划资助项目(2005AA303610) 江苏省自然科学基金资助项目(BK2009406)
关键词 精密定位 反射莫尔信号 模糊神经网络 PID控制 ultra-precision positioning reflective Moire signals fuzzy neural network PID control
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