摘要
详尽地分析了ＶＰＳ６０型溅射离子泵电源电路的工作原理将原电路整理简化为电源供给及高压测量电路，泵电流及泵真空压力测量电路、保护系统及遥控电路三大部分。
The working principle of power supply circuits of Model VPS 60 Ion Pump isanalyzed.The original power circuits are simplified into circuits of power supply and high voltagemeasurement,circuits of pump current and vacuum presure measurement and circuits of protection andremotion.
出处
《四川轻化工学院学报》
1999年第4期67-71,共5页
Journal of Sichuan Institute of Light Industry and Chemical Technology
关键词
VPS60型
溅射离子泵
电源
电路
泵
离子泵
Model VPS 60 Ion Pump
double voltage regulated current
logarithm amplifier
trip
