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Ba_(1—x)Sr_xTiO_3铁电薄膜的热演化特征与微结构 被引量:4

PYROLYSIS-EVOLUTION CHARACTERISTICS AND MICROSTRUCTURES OF Ba_(1-x)Sr_xTiO_3 THIN FILMS
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摘要 用醋酸锶(Sr(Ac)2)、醋酸钡(Ba(Ac)2)和钛酸四丁酯(TBT)为原材料,采用sol-gel工艺制备Ba1-xSrxTiO3系铁电薄膜研究了螯合剂乙酸丙酮(HAcAc)的添加对金属有机前驱体的热演化特性及薄膜微结构的影响提出控制薄膜微结构的有效途径。 The Ba1-xSrxTiO3 thin films were prepared by a sol-gel method using barium acetate (Ba(Ac)2). strontium acetate (Sr(Ac)2)and titanium-tetrabutoxide (TBT) as starting materials. Acetic acid and 2-methoxyethanol were selected as solvents separately. The efFects of addition of acetylacetone (HAcAc) on the characteristics of pyrolysis evolution and microstructures of thin films were investigated.The results showed that the addition of HAcAc changes the properties of inorganic intermediate-phases which transform into perovskite phase. Under the same heat treatment conditions, the grain size of the thin films modified by HAcAc is about 100urn, which is larger than that of the films without modification of HAcAc.
出处 《材料研究学报》 EI CAS CSCD 北大核心 1999年第6期637-640,共4页 Chinese Journal of Materials Research
基金 国家自然科学基金!59572038
关键词 SOL-GEL 存储器材料 铁电薄膜 钛酸锶钡 BST thin film, sol-gel, pyrofysis-evolution, microstructure
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参考文献1

  • 1Ding Yongping,Advances In Scienceand Technology.20,Surface Engineering,1999年,615页 被引量:1

同被引文献22

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  • 2肖定全.集成铁电学与铁电集成薄膜[J].物理,1994,23(10):577-582. 被引量:14
  • 3李霞章,陈志刚,陈建清,陈杨.醇水法制备纳米粉体原理及应用[J].硅酸盐通报,2006,25(2):82-85. 被引量:14
  • 4Sanzn, Baldeck P L, Baneza. Organic nanocrystals embedded in sol-gel glasses for optical application [ J ]. Synthetic Metals, 2000,115:229-234. 被引量:1
  • 5Ding Y P, Jin C Y, Meng Z Y. Investigation on the amorphous-crystalline transition and microstructure of sol-gel derived (Ba1-xSrx)TiO3 thin films [ J ]. Mater Res Bulletin ,2000,35 : 1187-1193. 被引量:1
  • 6Rizkalla A S, Jones D W, Hall G C. The influence of spray and freeze-drying preparation methods on the chemical compositions of six fled spathic glass formulations[J]. Br. Ceram. Trans. J. ,1991,90( 1 ) :1. 被引量:1
  • 7Ding YP, Jin C Y, Meng Z Y.Investigation on the amorphous-crystalline transition and microstructure of sol-gel derived (Ba1-xSrx)TiO3 thin films.Mater Res Bulletin, 2000,35:1187-1193 被引量:1
  • 8Joshi P C,Cole M W.Mg-doped Ba0.6 Sr0.4 TiO3 thin films for tunable microwave applications[J].Applied Physics Letters,2000,77 (2):289-291. 被引量:1
  • 9Chang W,Sengupta L.MgO-mixed Ba0.6Sr0.4TiO3 bulk ceramics and thin films for tunable microwave applications.[J] Journal of Applied Physics,2002,92(7):3941-3945. 被引量:1
  • 10Cole M W,Joshi P C,Ervin M H,et al.The influence of Mg doping on the materials properties of Ba1-x SrxTiO3 thin films for tunable device applications[J].Thin Solid Films,2000,374:34 -41. 被引量:1

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