摘要
传统的微机械陀螺采用扫频方法测试结构的品质因数,存在耗时长、测量效率低和精度差等问题。提出了一种新的品质因数测量方法,该方法的原理是通过对陀螺的驱动端施加一个激励脉冲,采集驱动检测端的相应衰减信号,并通过处理得到衰减信号的频率和斜率,从而检测陀螺的品质因数。采用自行设计的激励电路,外购NI公司的高速采集卡和基于LabVIEW的处理程序测试了陀螺的品质因数。采用该方法可以使一只微机械陀螺的品质因数测试时间从原来的3~5min减少到20s左右,极大地提高了测试效率和测试精度。通过对不同品质因数的陀螺样品的测量,充分验证了此种方法的效果和正确性。
The traditional test method for the quality factor of MEMS gyroscopes using the sweeping frequency has some defects,such as long measuring time,low efficiency and poor precision.A new test method for the quality factor of MEMS gyroscopes was presented.The principle of this method is applying an exciting pulse to the driving part of the gyroscope,and acquiring the corresponding damped signal from the driving detection part.The frequency and slope of this damped signal were calculated through the process of the signal to acquire the quality factor of the gyroscope.The measuring system was realized by self-designed exciting circuit,high speed data acquisition card purchased from NI and processing program based on LabVIEW.The result shows that this test method for the quality factor of one MEMS gyroscope reduces the time from 3-5 min to about 20 s,thus greatly improves the testing efficiency and precision.The effect and correctness of this method were validated by measuring the gyroscopes with different quality factors.
出处
《微纳电子技术》
CAS
北大核心
2011年第6期391-394,共4页
Micronanoelectronic Technology
