摘要
从一般共焦系统的原理出发， 重点围绕并行共焦方法的三维检测原理， 通过引用三维点扩散函数和矩阵形式， 研究了并行共焦检测方法的理论问题， 确立了点阵并行共焦检测方法的检测过程。其结果表明， 并行共焦检测过程总的光场分布， 是各条共焦检测光路的求和，
The basic principle of parallel confocal detecting method is proposed. With the 3 D point spread function and the matrix operating form, the mathematical model of 3 D detecting process based on the method is established, which has a higher theoretic value and a wider suitability due to the involvement of the general confocal and non confocal detection. Meanwhile, the conclusion of theoretical analysis shows that the optical detection of parallel confocal method conforms to the multiplication form of two point spread functions, which is the fundamental characteristic of confocal detection.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1999年第10期1381-1385,共5页
Acta Optica Sinica
基金
国家自然科学基金
中国博士后科学基金
关键词
并行共焦
三维检测
点扩散函数
矩阵形式
parallel confocal, 3 D detecting, point spread function, matrix operating form.
