摘要
数字式测高仪的测量速度、定位精度和测量力是表征其动态特性的3个主要方面.为此,论述了它们的具体测量方法,以某数字式测高仪为对象,采用微平面镜激光干涉仪、精密测力计等器具进行动态特性测试,给出了测试结果,分析了误差来源及其变化规律,其中,对测高仪定位误差的测试与分析是新的尝试.测试结论对改进测高仪的设计、提高测量精度具有实际价值.
Measuring speed,position accuracy and stylus force are three main dynamic characters of digital height measuring instrument（DHMI）.Test methods of the three important characters are discussed.And some measuring instruments such as a miniature plane-mirror interferometer and a precise forcemeter are employed for testing these characters.Testing results are presented and the sources and regularity of dynamic errors are analyzed.It is innovative to test and analyze the position accuracy of DHMI.These important test data and conclusions can be utilized to improve the measuring accuracy of DHMI.
出处
《北京工业大学学报》
EI
CAS
CSCD
北大核心
2011年第6期801-805,共5页
Journal of Beijing University of Technology
基金
国家自然科学基金资助项目(50627501)
关键词
测高仪
动态响应
定位误差
测量力
digital height measuring instrument
dynamic response
positioning error
stylus force
