摘要
采用LD泵浦的单纵模Nd：YVO4倍频激光器、自聚焦棒以及三维精密调整架构成斐索型干涉仪，它具有同时测量微区振动和面形的功能，着重给出了测量微区面形的实验结果和理论分析。
A Fizeau type interferometer reported here is composed of a LD-pumped singlemode double-frequency Nd: YVO4 laser, a different-size GRIN (Gradient Index) rod lens and a 3-D fine regulation stand. It is used for the measurement of the profile, deformation and oscillatory feature of micro- surfaces simultaneously. The experimental results and theoretical analysis are given.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1999年第10期907-911,共5页
Chinese Journal of Lasers
