摘要
照射在样品表面的激光束随着表面粗糙度的不同，反射光密度分布将不同；表面粗糙度增大时，反射光密度将被扩展。本文根据这一原理，提出一种使用激光束快速测量表面粗糙度的无触点光学法。通过测量反射光密度分布曲线的半宽度，由高斯曲线系数的标准差计算表面粗糙度。
A noncontact optical technique for rapidly measuring surface roughness using a laser is proposed. The reflected light intensity distribution of the laser beam illuminating the surface of a specimen will broaden as the surface roughness increases. The intensity distributions reflected from the surface of aluminum specimens were measured with a plasma coupled device(PCD). The reflected intensity curve can be approximated by a Gaussian function. The width of the intensity distribution curve was evaluated with the standard deviation, called a Gaussian curve parameter (GCP), of a Gaussian function approximating the intensity curve.
出处
《激光与光电子学进展》
CSCD
1999年第7期26-31,共6页
Laser & Optoelectronics Progress
关键词
激光
表面粗糙度
非接触测量
光学探测器
laser, surface roughness, Gaussian curve, optical sensor, computer control, reflected light intensity distribution
