摘要
在车间条件下操作时,光栅干涉仪在测量精度方面优于He-Ne激光干涉仪。基于光栅干涉测量系统有一些特别的优点,导致其在高精密测量中用途不断增加。阐述了衍射式光栅干涉测量系统的工作原理和特点,同时详细总结了国际上生产和研究衍射光栅干涉测量系统的厂家和研究机构及他们的产品。并指出该系统的发展趋势和存在的问题,为衍射式光栅测量系统的研究和发展提供参考。
In terms of measurement accuracy,the grating interferometers are often superior to He-Ne laser interferometers operating in air under workshop conditions.The application of the grating interferometer in high-precision measurement is increasing as the system based on some special advantages.The principle and characteristics of the reflective diffraction grating interferometer are described.A detailed summaries of the international manufacturers and research institutions who product and research the reflective diffraction grating interferometer measurement system and their products are made.The development trend and existing problems of this system are also pointed out to offer references to researches of diffraction grating measurement system.
出处
《光学技术》
CAS
CSCD
北大核心
2011年第3期313-316,共4页
Optical Technique
基金
国家自然科学基金(50805043)资助项目
关键词
光学测量
衍射光栅
位移测量
干涉
发展现状
optical measurement
diffraction grating
displacement measurement
interference
research status
