摘要
数字莫尔条纹滤波处理是利用莫尔条纹进行非球面检测的关键技术之一,滤波结果直接影响非球面检测的精度,分别从空域和频域两个角度对滤波算法进行了讨论分析,并进行了模拟实验。结果表明,经两种方法处理后恢复的波面得到了较好的结果,全孔径相位分布残差的均方根(RMS)值分别为0.024λ和0.035λ,证明了滤波方法是可行的。
Digital Moire patterns filter processing is a key technique of aspheric testing by using the Moire patterns, and the filtering result immediately influences the precision of aspheric testing. The discussion analysis is carried on from the spatial domain and the frequency domain. And the modeling is also carried on. The root mean square （RMS） of the full aperture phase distribution residual error is seperately 0. 024A and 0. 035,t, and the results show that the filtering method is feasible.
出处
《激光与光电子学进展》
CSCD
北大核心
2011年第5期69-73,共5页
Laser & Optoelectronics Progress
基金
国家杰出青年基金(69925512)资助课题
关键词
测量
数字莫尔条纹
空域滤波
频域滤波
傅里叶变换
measurement
digital Moir
patterns
spatial domain filter
frequency domain filter
Fourier transformation
