期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

PET柔性衬底上生长绒面ZnO-TCO薄膜及其在薄膜太阳电池中的应用 被引量：12

Surface textured ZnO-TCO thin films grown on PET flexible substrates and the applications in thin-film solar cells
原文传递
导出
摘要 利用低压金属有机化学气相沉积(LP-MOCVD)技术在PET柔性衬底上低温生长绒面结构ZnO-TCO薄膜,DEZn和H2O作为源材料,B2H6作为掺杂剂。详细研究了薄膜掺杂流量对ZnO薄膜微观结构以及光电性能影响。优化获得的PET/ZnO:B薄膜厚约为1500 nm时,绒面结构PET/ZnO薄膜的方块电阻约为10Ω,可见光及近红外范围平均透过率达80%。初步应用于a-Si薄膜电池,电池结构为PET/ZnO-TCO/pin-a-Si/Al,电池的转换效率可达6.3%。 The low-pressure metal organic chemical vaper deposition（LP-MOCVD） technique is used to grow textured ZnO-TCO thin films on PET substrates at low temperature.The effects of the B-doping on the microstructure,electrical and optical properties of the ZnO thin films are investivated.Typical PET/ZnO：B films are with thickness of 1 500 nm,sheet resistanceof Rs～10Ω,and average transmittance in the visible and near infrared region of Ta～80%.The textured ZnO-TCO thin films are used in a-Si thin film solar cells and an efficiency of 6.3% is abtained（solar cell structure：PET/ZnO-TCO/pin-a-Si/Al）.
作者 林泉 陈新亮 倪牮 张德坤 孙建 赵颖 耿新华
机构地区 南开大学光电子薄膜器件与技术研究所
出处 《光电子．激光》 EI CAS CSCD 北大核心 2011年第5期714-717,共4页 Journal of Optoelectronics·Laser
基金 国家重点基础研究发展计划资助项目(2011CB201605,2011CB201606&2011CB201607) 天津市应用基础及前沿技术研究计划资助项目(09JCYBJC06900) 中央高校基本科研业务费专项资金项目(65010341)
关键词 金属有机化学气相沉积(MOCVD) PET柔性衬底 ZnO-TCO薄膜 薄膜太阳电池 metal organic chemical vapor deposition（MOCVD） PET flexible substrates ZnO-TCO thin films thin-film solar cells
分类号 O484 [理学—固体物理]
  • 相关文献

参考文献16

  • 1Muller J,Rech B,Springer J,et al. TCO and light trapping in silicon thin film solar cells[J]. Solar Energy, 2004,77: 917- 930. 被引量：1
  • 2Chen X L, Geng X H, Xue J M, et al. Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition[J]. Journal of Crystal Growth, 2006,296 : 43- 50. 被引量：1
  • 3Anna Selvan J A,Delahoy A E,Guo S Y,et al. A new light trapping TOO for nc-Si:H solar cells[J]. Solar Energy Mater Solar Cells, 2006,90: 3371-3376. 被引量：1
  • 4Banerjee A N,Ghosh C K,Chattopadhyay K K,et al. Low-temperature deposition of ZnO thin films on PET and glass substrates by DO-sputtering technique[J]. Thin Solid Films, 2006, 496: 112-116. 被引量：1
  • 5Pei Z L,Zhang X B,Zhang G P,et al. Transparent conductive ZnO:Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering[J]. Thin Solid Films,2006, 497,20-23. 被引量：1
  • 6Prepelita P, Medianu R, Sbarcea B, et al. The influence of using different substrates on the structural and optical characteristics of ZnO thin films[J]. Applied Surface Science, 2010,256;1807- 1811. 被引量：1
  • 7Szyszka B,Sittinger V,Jiang X,et al. Transparent and conductive ZnO: Al films deposited by area reactive magnetron sputtering[J]. Thin Solid Films, 2003,442: 179-183. 被引量：1
  • 8Jeong W J, Park G C. Electrical and optical properties of ZnO thin film as a function of deposition parameters[J]. Solar Energy Materials and Solar Cells,2001,65:37-45. 被引量：1
  • 9Ning Z Y,Oheng S H,Ge S B,et al. Preparation and characterization of ZnO:Al films by pulsed laser deposition[J]. Thin Solid Films, 199? ,307 : 50-53. 被引量：1
  • 10Ramakrishna Reddy K T, Gopalaswamy H, Reddy P J,et al. Effect of gallium incorporation on the physical properties of ZnO films grown by spray pyrolysis [J]. Journal of Crystal Growth,2000,210 : 516-520. 被引量：1

二级参考文献30

  • 1Chen X L,Geng X H, Xue J M,et al. Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition[J].Journal of Crystal Growth, 2006,296 : 43-50. 被引量：1
  • 2Meier J, Kroll U, Dubail S, et al. Efficiency enhancement of amorphous silicon p-i-n solar cells by LP-CVD ZnO[A]. The 28th IEEE Photovoltaic Specialists Conference[C]. Rome, Italy, Anchorage: 2000,746-749. 被引量：1
  • 3Dewald W, Sittinger V, Werner W,et al. Optimization of process parameters for sputtering of ceramic ZnO, Al2O3 targets for a-Si: H/μc-Si: H solar cells[J].Thin Solid Films, 2009,518 1085-1090. 被引量：1
  • 4Sittinger V, Ruske F, Werner W, et al. ZnO: AI films deposited by in-line reactive AC magnetron sputtering for a-Si.. H thin film solar cells[J]. Thin Solid Films, 2006,496:16-25. 被引量：1
  • 5Jauncey G E M. Note on the theory of the modified reflection of x-rays by crystat[J].Physical Review, 1941,59:456-458. 被引量：1
  • 6Patterson A L. The Scherrer formula for X-ray particle size determination[J]. Physical Review, 1939,56: 978-982. 被引量：1
  • 7Berginski M, Hupkes J, Schulte M, et al. The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells[J].Journal of Applied Physics, 2007,101 : 074903. 被引量：1
  • 8Meier J, Spitznagel J, Fay S,et al. Enhanced light-trapping for micromorph tandem solar cells[A]. Proceedings of the 29th IEEE Photovoltaic Specialists Conference[C]. New Orleans, USA:2002,1118-1121. 被引量：1
  • 9[1]Chen Y F, Zhu Z Q, Bagnall D M, et al. ZnO quantum pyramids grown on c- plane sapphire by plasma- assisted MBE [J]. J Crystal Growth, 1998, 184(1): 269- 273. 被引量：1
  • 10[2]Chen Yefan, Bagnall D M, Hang- jun koh, et al. P- MBE of ZnO on c- plane sapphire: Growth and characteri- zation [J].J Appl Phys, 1998, 84(7):3912- 3918. 被引量：1

共引文献34

同被引文献128

引证文献12

二级引证文献21

光电子．激光
2011年 第5期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部