摘要
通过电化学交流阻抗谱(EIS)研究了Zn-Al涂层在铜加速醋酸盐雾试验中的腐蚀行为,建立了等效电路模型并分析了相关电化学参数随时间的变化规律。采用扫描电镜及能谱仪分析了涂层腐蚀后的形貌及成分组成,阐释了电化学参数的演变规律。结果表明,盐雾试验中Zn-Al涂层的腐蚀由电化学反应控制逐渐转变为扩散控制,最后进入基体腐蚀阶段。
Ba0.7 Sr0.3 TiO3 thin films were deposited on alumina ceramic substrates by RF magnetron sputtering method and BST parallel plate tunable capacitors were prepared by photolithographic process. The effect of deposition conditions on dielectric tunability and loss tangent of BST thin films was investigated. It was found that the BST thin film with about 52% tunability and about 0.8% loss tangent were deposited at 4 Pa ambient pressure with an O2/Ar ratio of 30 = 70, and substrate temperature of 800℃. Measurements indicated that the quality factor of BST capacitors decreased from 125 to 42 with test frequency increasing from 1 to 100MHz.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2011年第B04期226-229,共4页
Journal of Functional Materials
基金
国家自然科学基金重点资助项目(50735006)
国家自然科学基金资助项目(50971132)
国家科技支撑计划资助项目(2007BAB27B02-04)
关键词
Zn-Al涂层
腐蚀
电化学交流阻抗
BST thin film
Al2O3 alumina ceramic substrate
RF magnetron sputtering
tunable capacitor
