摘要
以丙烯为源物质氩气为稀释气体，研究了沉积温度、丙烯流量、系统总压对沉积物形貌的影响．利用晶体成核－生长理论解释了各种形貌的成因．实验证明随着沉积温度的升高、系统总压的增大，热解碳的沉积由表面化学反应成核－生长模式向熔滴模式和气相成核－生长模式过渡．沉积温度不同丙烯流量对沉积模式影响规律不同．沉积模式随沉积条件的改变决定了热解碳沉积物形貌的改变．
The effects of deposition tempertature,flow of C3H6, total pressure on the morphology of deposits were studied with C3H6 as source material, Ar as dilute gas. Three kinds of morphologywere accounted by using the principle of the nuclei-growth of crystal. It was showed that thedeposition mode of Pyrolytic carbon changes from surfacial nuclie-growth mode to droplet modeand gasous nuclie-borne mode as increasing deposition temperature and total pressure. The effectof flow of C3H6 on deposition mode underlies different principle under different deposition temperatures. The change of the morphology of Pyrolytic carbon can be determined by the changesof deposition mode of Pyrolytic carbon with deposition condition.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第5期769-774,共6页
Journal of Inorganic Materials
关键词
热解碳
沉积条件
沉积模式
丙烯
热解
碳
形貌
pyrolytic carbon, deposition condition, deposition mode, morphology
