摘要
纳米压印技术作为1种新兴的微纳制造技术,受到了学术界极大的关注。UV光固化纳米压印因其工艺加工精度高,生产效率高,成本低,对准性好,在纳米压印中具有无可比拟的优势。在其不断发展中对核心要素之一的感光树脂的应用也提出了新的要求与挑战。本文总结了纳米压印技术及感光树脂应用的发展,同时提出了1种新的纳米压印光刻技术,并对感光树脂的发展提出展望。
Nanoimprint has captured the attention of academic world as a novel micro-nano manufacturing technology. UV curing nanoimprint has it incomparable advantage as high definition, high production efficiency, low cost as well as excellent veracity. With the development of it, there are some new requirements and challenges for its core elements-photosensitive resin. The paper summarized the development of nanoimprint and the photosensitive resin. At the same time, put forward a kind of new nanoimprint lithography technology and view the prospective of Photosensitive Resin.
出处
《信息记录材料》
2011年第2期45-49,共5页
Information Recording Materials
关键词
纳米压印
UV光固化
感光树脂
电润湿
电毛细
nanoimprint
UV Curing
photosensitive resin
electrowetting
electro-capillary
