摘要
二氧化钒(VO2)薄膜是目前微测辐射热计的首选材料,但其性能还有很大的提高空间,开展其改性研究具有重要意义。VO2薄膜改性旨在通过材料组分和结构的调控获得更好的性能,以满足高性能微测辐射热计应用的要求。目前改善VO2薄膜热敏电阻特性的主要方法是采用离子掺杂和新的形态结构(纳米和非晶)。文章介绍了VO2的基本结构及其在微测辐射热计上的应用,综述了离子掺杂、纳米及非晶结构VO2薄膜的研究现状,并提出了未来VO2薄膜改性研究的方向。
Vanadium dioxide（VO2） thin films are the preferable infrared sensitive material for microbolometer application,but their performance is far from optimization until now,so the modification study of VO2 thin films is really full of significance.For high performance microbolometer application,the modification is aimed to obtain better material properties by controlling the composition and microstructure of VO2 thin films.At present,ions doping and new microstructure（i.e.nano and amorphous structure） are adoptd as the main methods to improve the performance of VO2 thin films.In this paper,the basic structure of VO2 and its application in microbolomete are introduced,and the research status of ions doing and nano-structure（amorphous） VO2 thin films are reviewed.Finally,the focus of VO2 thin films modification study is proposed.
出处
《云南师范大学学报（自然科学版）》
2011年第2期26-32,共7页
Journal of Yunnan Normal University:Natural Sciences Edition
关键词
VO2薄膜
改性研究
离子掺杂
纳米结构
微测辐射热计
vanadium dioxide thin films
modification study
ions doping
nano structure
microbolometer
