摘要
双端音叉式硅微谐振器在制造过程中的误差会造成两根振梁谐振频率存在差异,这种差异严重降低了双端音叉式硅微谐振器的品质因数,进而造成传感器精度降低等问题。该文利用电容式传感器存在静电负刚度效应的原理,采用改变直流预载电压的电调整方法对振梁的刚度进行修调,从而精确地将两根振梁的谐振频率调整到一致。对这种方法进行了试验验证,试验结果验证了这种电修调的可行性。电修调可以有效提高双端音叉硅微谐振器的品质因数。
The manufacturing errors of a MEMS double-ended-tuning-fork（DETF） resonator tend to cause difference between resonant frequencies of the two beams,which further leads to the decline of the resonator＇s quality factor and the sensor＇s performance.In this paper,a method was developed based on the negative stiffness effect of capacitance sensors to control the preload-voltage to adjust the resonator＇s stiffness,with the frequencies of the beams then being equalized.Tests show the feasibility of the method and improvement of the DETF resonator＇s quality factor.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2010年第11期1798-1800,共3页
Journal of Tsinghua University(Science and Technology)
基金
国家“十一五”预研项目(51308050208)
关键词
双端音叉
微机电系统
谐振器
谐振频率
品质因数
double-ended-tuning-fork（DETF）
MEMS
resonant sensor
resonant frequency
quality factor
