摘要
提出一种ＩＣ缺陷特征的提取算法，该算法能自动检测出ＩＣ缺陷的位置．在预处理阶段，利用形态开运算消除小缺陷和背景噪音，对开后的结果图像进行形态腐蚀，获得冗余物型缺陷的位置特征．实验证明了该算法的正确性．该结果为计算机自动检测ＩＣ真实缺陷提供了有效的途径．
A new extracting algorithm for IC defects is presented, whch can be used to detect the position of an IC defect automatically. First, the morphological opening is used to detect some defects and background noise. This step is followed by morphological eroding, which can determine the positions of the extra material defects of an IC. Experimential results show that the algorithms is valid and makes it possible for a computer to detect IC defects automatically.
出处
《西安电子科技大学学报》
EI
CAS
CSCD
北大核心
1999年第4期510-513,共4页
Journal of Xidian University
基金
西安电子科技大学科研基金
北京大学视觉与听觉信息处理实验室开放课题基金
关键词
IC缺陷
缺陷位置提取
形态算子
IC defects
defect position extracting
morphological operators
