摘要
提出了表面粗糙度变波矢光散射测量方法，通过散射光强中心亮点光能量的对数ｌｎＥδ随ｋ２⊥变化的线性关系来确定粗糙度ｗ，对６块粗糙度不同的硅片背面样品进行了实验测量。
Based on the linear relationship between the logarithm of the central peak
energy and k 2 ⊥ in light scattering, a method for the measurement of surface roughne by
changing the wave vectors is proposed. Experimental measurements of 6 samples of silicon
backsides were conducted.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1999年第7期1006-1008,共3页
Acta Optica Sinica
关键词
光散射
变波矢
粗糙度
测量法
light scattering, variable wave vectors, surface
roughness.
