摘要
对于氧化层厚度的精确测量,尤其是小于10 nm的超薄氧化层的测量有一定难度.介绍了一种根据XPS图谱中氧化态和金属态的相对强度计算超薄氧化铝厚度的方法,并结合高分辨透射电镜、X射线衍射仪等多种表征手段进行验证.结果表明该方法具有简单、准确等优点.
It is difficult to measure the thickness of oxide layer accurately,especially for the ultrathin oxide layer less than 10 nm.Presents a method to calculate the thickness of ultrathin alumina,based on the relative strength of oxidized and metallic state in XPS spectrum,combines the HRTEM,XRD and other characterizations to verify.The experimental results prove that this method is simple and accurate.
出处
《河南教育学院学报（自然科学版）》
2010年第4期14-16,共3页
Journal of Henan Institute of Education(Natural Science Edition)
基金
国家自然科学基金(21042004)
河南省教育厅自然科学基金(2009A140003)
关键词
纳米铝粉
表征方法
AL2O3薄膜
厚度测量
nanophased aluminum
characterization
Al2O3 film
thickness measurement
