摘要
利用旧的真空装置改造成一个物理气相沉积设备，不仅节约了大量的资金，而且还为今后的科研工作开辟了一个崭新的领域。本文主要讨论了在改造过程中，根据物理气相沉积的共性以及本实验装置的特定要求和需要注意的几个问题，如一个真空沉积腔的整体结构、密封性和冷却结构，如何有效地利用载物台、励磁电路和点火电路的设计等，提出了改造方案。目前，已成功地将它改造成真空度为１０－ ２τ的低真空等离子沉积装置。
Much amount of fund is reduced and a new research field is developed for an old vacuum heat treatment furnace to be renovated into a physical vacuum deposition apparatus. According to the common features and the special requirements of physical vacuum deposition equipment, a deposition chamber made of brass is added to replace its original vacuum heat treatment chamber. This deposition chamber mainly consisted of three separated parts: electrodes, a magnetic exciting chamber and a substrate holder. In addition, the other aspects such as sealing and cooling system, the space of holder, trigger circuit, magnetic exciting circuit are considered in renovation. It is very important to keep the system cooled effectively in order that it can be kept in a relatively low temperature during deposition. After a series of improvements, an old vacuum heat treatment furnace has been renovated into a physical vacuum deposition system with a vacuum degree up to 10 -2 τ.
出处
《南京航空航天大学学报》
EI
CAS
CSCD
北大核心
1999年第5期552-555,共4页
Journal of Nanjing University of Aeronautics & Astronautics
