摘要
为了精确操控微流体,设计并制作了一种基于静电力的微液滴驱动芯片。介绍了驱动原理和工艺流程,搭建了驱动检测实验平台。芯片采用开放式的结构,只需单层共平面控制电极,以硅作衬底,氧化硅和多晶硅作绝缘层,重掺杂多晶硅为驱动电极阵列,高质量Si3N4作介质层,碳氟聚合物为疏水层。实验表明:微液滴可在芯片上按程序设定方式在二维平面内流畅运动,最小驱动电压为15V,最大运动速度达96mm/s。芯片制作工艺简单,操作方便,可应用于生化分析芯片实验室系统。
A droplet actuating chip was designed and fabricated using electrostatic force to manipulate microfluid. The actuation principle and fabrication processes are introduced. Experimental platform for actuating test are demonstrated. With open structure, the chip consists of silicon as substrate, silicon oxide and polysilicon as insulating layer, heavily doped polysilicon as actuating electrode arrays, high quality Si3 N4 film as dielectric layer, and fluorocarbon polymer as hydrophobic layer. Experiment shows that the droplet is transported smoothly in a programmable manner in the two-dimensions plane at a minimum voltage of 15 V, and the maximum speed reached to 96 mm/s. The droplet actuating chip can be used in lab-on-a-chip system due to its simple fabrication process and convenient operation.
出处
《传感器与微系统》
CSCD
北大核心
2011年第2期116-118,121,共4页
Transducer and Microsystem Technologies
基金
国家重点基础研究发展计划(973)资助项目(2006CB300403)
国家高技术研究发展计划(863)资助项目(2007AA03Z308)
国家自然基金委创新团队资助项目(60721004)
关键词
微流控
液滴
静电驱动
共平面电极
mierofluidies
droplet
electrostatic actuation
coplanar electrode
