摘要
建立了激光热应力切割有限元仿真模型,用于研究三维对称氧化铝陶瓷基片切割过程中的温度场和热应力场分布,以及激光功率、陶瓷厚度和切割速度等工艺参数对材料表面最高温度和应力的影响,并通过对比实验验证了该模型的正确性.结果表明,随着裂纹尖端的临界正应力增加,断裂表面的微裂纹加深,并引起材料表面的颗粒剥落,使得切割断面的粗糙度增大.
In order to study the distributions of temperature field and thermal stress field,a three-dimensional axial symmetric model of alumina ceramic was established. This paper described the thermal stress＇s variation of the cutting point and studied the influence of laser power,ceramic thickness and cutting speed on the temperature field and thermal stress field.The model was validated by comparative experiments.The results show that with the increase of the tensile stress,the microcrack becomes deeper,which induces more surface particles to run off,then the roughness increases.
出处
《上海交通大学学报》
EI
CAS
CSCD
北大核心
2011年第1期40-44,49,共6页
Journal of Shanghai Jiaotong University
基金
国家自然科学基金项目(50905112)
关键词
陶瓷
激光加工
热应力切割
可控断裂
温度场
ceramic
laser-controlled
thermal stress cutting
controlled fracture
temperature field
