摘要
在检验光路中,采用补偿透镜来补偿口径为φ500mm的非球面透镜的使用波长(λ=1053nm)与检测波长(λ=632.8nm)之间的色差。给出补偿透镜的求解方法,得到非球面透镜的补偿检验光路,并就非球面透镜的检验精度进行分析。通过精度分析可以看出,在此种补偿检验光路下,非球面透镜的透射波前PV不低于0.2λ(λ=632.8nm),可满足元件的精度要求。
The diameter of the aspheric lens is Φ500mm,it is used under transmission system,and its using wavelength is λ=1053nm,but the test wavelength of interferometer is λ=632.8nm. The aspheric lens has chromatic aberration between two wavelengths. Among the test optical path,a compensation lens is used to compensate the chromatic aberration between the two wavelengths. A method to solve the parameter of the compensation lens is given,the compensation test optical path is gotten,and the test precision of the aspheric lens is analyzed. From the precision analyses,the transmission wave-front PV of the compensation lens is better than 0.2λ（λ=632.8nm）under this compensation test optical path.
出处
《光学技术》
CAS
CSCD
北大核心
2010年第6期838-841,共4页
Optical Technique
基金
高技术研究与发展计划(051Z331BOA)资助项目
关键词
非球面透镜
透射波前
补偿检验
精度分析
aspheric lens
transmission wave-front
compensation test
precision analysis
