摘要
介绍了铟锡氧化物（ＩＴＯ）薄膜的特征，主要生产工艺及其在汽车、宇航、建筑、电子、太阳能等领域的应用。
The paper introduces the properties of ITO film process technologies and its applications in the fields of automobile, aerospace, construction, electronics, solar energy, etc and outlooks the production and the market.
出处
《材料科学与工程》
CSCD
1999年第2期98-100,80,共4页
Materials Science and Engineering
