摘要
论述了一种新型气动传感器——气针式传感器的静特性。气针式传感器的研制将使气动测量技术用于高精度测量场合成为可能。该传感器的测量范围为±１０μｍ，整个测量系统精度可达±０．０９μｍ．对系统经过进一步完善后，预计测量精度可达±０．０５μｍ．
It is expounded in this paper the statical characteristics of a novel pneumatic sensor,pneumatic probe sensor.The develorping of the pneumatic probe sensor will open up the possibility for pneumatic measuring technique in high precise measurement.The measuring range of this sensor is ±10μm.The measuring accruacy of whold system is ±0 09μm.After imnprovement and perfection the measuning accuracy will reach to ±0 05μm in estimation.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第5期4-6,共3页
Instrument Technique and Sensor
基金
航天部九五规划项目资助
安徽省自然科学资金
关键词
气动测量
气针式
传感器
尺寸测量
Pnenmatic Measurement,Pneamatic Probe Sensor,High Precise Measurement
