摘要
本文介绍了一种高准确度石英谐振式力传感器，针对其在工程化过程中遇到的一系列问题，从理论到实验进行了研究，解决了组合式结构石英传感器的蠕变问题，并研究了传感器的稳定性与谐振器厚度及支撑状况的关系。
This paper introduces a kind of quartz resonator force sensors with high precision. Several engineering problems are studied with methodology and experiments. The creep of the sensor of combinatory structure is resolved,and the effects of the thickness of resonator and its supporting on the stability of sensor are also analyzed.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第3期275-279,共5页
Chinese Journal of Scientific Instrument
基金
国家"九.五"重点科技攻关项目!96-748-01一94
关键词
石英谐振器
力传感器
蠕变
胶粘剂
稳定性
Quartz crystal resonator ,Force sensor, Creep ,Adhesive ,Stability
