摘要
为了快速地自动计算非规则几何槽形光栅的衍射效率,使用MatLab软件模拟各种槽形,自动获取槽形参数,并根据这些槽形参数运用严格耦合波分析方法,计算光栅的衍射效率。结果表明所设计的计算程序能够快速自动分析非规则几何槽形并计算其衍射效率。该方法可用于循环计算槽形逐渐变化过程中的衍射效率。
In order to calculate rapidly and automatically the diffraction efficiency of gratings with irregular profile, software MatLab was used to simulate the profile, collect parameters,and calculate diffraction efficiency in the rigorous coupled-wave analysis method with the parameters collected. Results showed that the programs designed for calculation can analyze the irregular profile and calculate the diffraction efficiency automatically and quickly, and can be applied to calculate continuously diffraction efficiency of gratings with a gradually changing profile.
出处
《光学仪器》
2010年第4期16-20,共5页
Optical Instruments
基金
江苏省科技厅科技支撑计划资助项目(BE2009171)
关键词
信息光学
衍射光栅
衍射效率
非规则几何槽形
information optics
diffraction grating
diffraction efficiency
irregular geometry profile
