摘要
提出了利用MEMS技术将电化学生长的Al2O3模板加工成传感器的微悬梁结构，并将其用于催化燃烧式气体传感器结构的基底。采用平面薄膜工艺制作出铂薄膜敏感电阻器，涂敷Al2O3-ZrO2-ThO2-Pt—Pd和Al2O3-ZrO2-ThO2-PbO形成催化敏感桥臂和温湿度补偿桥臂，从而制作出汽油传感器。测试结果表明：传感器可实现汽油体积分数为（0-15）×10^-3的检测（标准气为己烷），且具有线性输出特性。同时对汽油传感器的工作初始稳定性和长期稳定性问题进行了研究。
An alumina template formed by electrochemical growth is processed into micro-cantilever structure using MEMS technology. Such structure is used as the substrate of the catalytic combustion type gas sensor. The platinum film resistance is made by plane film process. Furthermore, the sensitive arm and temperature compensation arm are formed by coating Al2O3-ZrO2-ThO2-Pt-Pd and Al2O3-ZrO2-ThO2-PdO for making the gasoline sensor. The result indicated that the sensor can detect the gasoline volume fraction ranging from 0 to 15 × 10^-3（ the standard gas is methane ） and possess the properties of linear output. Meanwhile,the initial stability and long-term stability of gasoline sensor are also studied.
出处
《传感器与微系统》
CSCD
北大核心
2010年第6期77-79,共3页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2006AA040101)
国家自然科学基金资助项目(60971020)
