摘要
介绍了通过热化学气相合成法制备的纳米SiC粉末，颗粒呈球形，尺寸分布窄，少团聚，最小尺寸约9nm．探讨了反应温度对制得的纳米粉末颗粒度及组成的影响．结果表明：提高反应温度，则颗粒尺寸与晶粒尺寸均增大，粉末的生成愈完全，且几乎全部为β相．
Nanometer SiC powders synthesized through chemical vapour deposition process are briefly introduced. Effect of reaction temperature on the particle size and composition of the obtained powders was in detail explored as other technique parameters were fixed. Results showed that nanometer-sized SiC powders with spherical appearance, narrow particle size distribution, less agglomeration and gum being the smallest average size can be achieved using the above synthesizing method. Both the particle size and grain size increased with increasing reaction temperature. The phase composition was determined to be almost complete β-type and seems to not vary with temperature.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
1999年第1期95-98,共4页
Chinese Journal of Materials Research
关键词
热化学气相合成
温度
纳米
碳化硅粉
chemical vapour deposition, temperature, nanometer SiC powder
