摘要
本文论述了扫描力显微镜中的点衍射干涉现象，论证了硅微探针可以作为后向点衍射板并用于检测微探针变位的光学原理。根据这一原理设计了一种新型灵巧的扫描力显微镜，它具有更好的抗干扰能力，稳定优质的光电信号。理论分析及实测表明，该扫描力显微镜具有０．０１ｎｍ的纵向分辨率、５ｎｍ左右的横向分辨率。
The phenomenon of point diffraction interference in scanning force microscope is presented in this paper.We demonstrate the principle that silicon micro probe can be used as a backward point diffraction interference plate and for testing the deflection of probe.We designed a novel scanning force microscope using this principle.This instrument have good interference free ability,so we can get high stability and high quality optoelectrical signal.0 01nm vertical resolution and 5nm horizontal resolution is gotten by this instrument.
出处
《电子显微学报》
CAS
CSCD
1999年第1期6-12,共7页
Journal of Chinese Electron Microscopy Society
关键词
扫描力显微镜
点衍射
微探针
干涉现象
scanning force
point diffraction interference
microprobe
