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CMOS成像器件性能测试方法的研究 被引量:10

Research on Evaluation Method of CMOS Imager
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摘要 针对CMOS成像器件结构的特殊性,发展并提出了"像元光子转移技术"法测量增益和读出噪声。同时对CMOS器件的线性度、满阱电荷、暗流、不均匀性和量子效率等性能的测试方法进行了研究。最后基于2k×2kCMOS芯片进行了性能测试实验,实验结果也验证了该测试方法的可行性和可靠性。 Photon-transfer technique for single pixel is developed to measure the readout noise and gain of CMOS imager in consideration of its special structure. The methods to evaluate the linearity, well capacity, dark current, pixel non-uniformity and quantum efficiency are also discussed. At last, evaluation test is carried out based on a 2 k×2 k CMOS sensor. The experiments show that the evaluation method is feasible and reliable.
出处 《激光与光电子学进展》 CSCD 北大核心 2010年第5期68-73,共6页 Laser & Optoelectronics Progress
基金 国家自然科学基金面上项目(10603009) 北京市科技新星项目(2008B57)资助课题
关键词 CMOS成像器件 读出噪声 增益 量子效率 满阱电荷 CMOS imager readout noise gain quantum efficiency full well capacity
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参考文献9

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