摘要
研究了衍射强度均匀分布的二元位相光栅的设计原理，利用微电子工艺加工了１６个衍射点强度均匀分布的二元位相光栅，并给出了实验结果。
In this paper, the design principle of binary phase gratings with well distributed diffraction intensities is discussed. Binary phase gratings with 16 orders well distributed diffraction intensities are fabricated by using micro electro technology and experimental results are given.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1999年第1期43-46,共4页
Chinese Journal of Lasers
基金
江苏省科委科技发展计划资助项目
