摘要
计算机分系统是光刻机整机控制和管理的中枢，直接反映和影响着整机的性能和指标。介绍了计算机硬件接口控制原理，描述了分步重复投影光刻机系统软件的主要设计思想和软件的主要功能。
Computer sub system is the center for control and management of the whole wafer stepper.It directly reflects and affects the characteristics and specifications of the system.The interface control principle of the computer hardware is introduced in the paper.The main design ideas and the main functions of the software in the wafer stepper are described.
出处
《光电工程》
EI
CAS
CSCD
1998年第3期32-36,共5页
Opto-Electronic Engineering
关键词
分步重复光刻机
控制软件
接口
光刻机
Step and repeat photoetching machines,Control software,Interface.
