1Spencer W J , Corbett W T , Dominguez L R , et al. An electronically controlled piezoelectric insulin pump and valves[ J ] . IEEE Trans. Sonics Ultrasonbics, 1978 ,25 (3) :153 - 156. 被引量：1
2Linnemann R , Woias P , Senfft C-D , et al . A selfpriming and bubble-tolerant piezoelectric silicon micropump for liquid and gases [ C] // Proc. of the llth IEEE MEMS, Technical Digest. Heidelberg : [ s. n. ], 1998:532 - 537. 被引量：1
3Cunneen J, Lin Yu-Cheng, Caraffin S, et al . Apositive displacement micropump for microdialysis [ J ]. Mechatronics, 1998,8 : 561 -583. 被引量：1
4Koch M, Harris N, Evans A G. R, et al . A novel micromachined pump based on thick --film piezoelectric actuation [ J ] . Sensors and Actuators , 1998,70:98 - 103. 被引量：1
7Chen Yutang, Kang Shungwen, Wu Lungchi, et al. Fabrication and investigation of PDMS micro diffuser/nozzle [ J ]. Journal of Materials Processing Technology, 2008, 198 (1/3) :478 - 484. 被引量：1
8Ivanoi, Dino A, Ariannam, et al . Modeling and experimental validation of a piezoelectric micro - pump with novel no-moving-part valves [ J]. Sensors and Actuators, 2007, 133 : 128:140. 被引量：1
7ULLMANN A. The piezoelectric valve-less pump-performance enhancement analysis [J]. Sensors and Actuators A, 1998, 69(1): 97-105. 被引量：1
8GERLACH T, SCHUENEMANN M, WURMUS H. A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves [J]. J Micromech Microeng, 1995,5(1): 199-201. 被引量：1
9GERLACH T, WURMUS H. Working principle and performance of the dynamic micropump[J]. Sensors and Actuators A, 1995, 50(1-2): 135-140. 被引量：1
10MATSUMOTO S, KLEIN A, MAEDA R. Development of bi-directional valve-less micropump for liquid[C]. Proc IEEE MEMS, 1999. 141-146. 被引量：1
