摘要
介绍了激光合成波长干涉纳米位移测量的原理，设计了基于复杂可编程逻辑器件（CPLD）的激光合成波长干涉纳米位移测量信号处理系统，包括信号前置处理电路的设计和CPLD信号处理模块的设计。采用Visual Basic自带的MSComm控件实现了PC机与CPLD之间的通信，对实验过程进行了实时监控。在恒温恒湿条件下，分别以5nm和10nm为步长进行了位移测量实验，实验结果表明：在测量镜移动0-200nm范围内，测量结果线性相关系数分别为0．9991和0．9998，标准偏差分别为1．85nm和2．54nm，验证了所设计的信号处理系统能够实现纳米级位移测量精度的要求，具有较高的可靠性和实用性。
The laser synthetic wavelength interferometric nano-displacement measurement is intro- duced. A signal processing system for the measurement based on Complex Programmable Logic Device （CPLD）is designed, including the design of signal pre-processing circuit and CPLD processing module. A PC software is also designed that the MSComm ActiveX of Visual Basic is used to realize the communica- tion between PC and CPLD module, and it can monitor the experiment in real time. Under the condition of constant temperature and humidity, displacement measurement experiments with 5nm and 10nm deplace- ment increment are carried out. The experimental results show that the linear correlation coefficient is 0. 9991 and 0. 9998 with the standard deviations of 1. 85nm and 2. 54nm over a range of 200 nm, respectively. This demonstrates that the designed system has high reliability and practicability.
出处
《浙江理工大学学报（自然科学版）》
2010年第2期239-243,258,共6页
Journal of Zhejiang Sci-Tech University(Natural Sciences)
基金
国家自然科学基金项目(50827501)
关键词
激光干涉
合成波长
CPLD
纳米位移测量
信号处理
laser interferometer
synthetic wavelength
CPLD
nano-displacement measurement
sig- nal processing
