摘要
常规的光学显微镜和扫描电镜(SEM)检测为破坏性检测,且测量时间长,不便于现场应用于涂层厚度的测量。为此,制备了X射线荧光法(XRF)测量Ti/IrO2-Ta2O5涂层厚度所需的校正标样,采用XRF测量了涂层的厚度,并与SEM测量的涂层厚度进行比较。结果表明:标样的涂层厚度和组分分布均匀;XRF测试中发射法比吸收法的灵敏度高,偏差小;XRF的测量结果与SEM的相近,偏差小,可靠度高。
Ti/IrO2-Ta2O5 standard samples for measurementof the thickness of oxide coatings by X-ray fluorescence were pre-pared.The samples were tested by means of X-ray fluorescence and scanning electron microscopy for a comparison.Results indi-cate that the IrO2-Ta2O5 oxide coating prepared on polished Ti substrate by sol-gel process of polymers has uniform thickness and distribution of composition.For the two types of X-ray fluo-rescence method,a higher sensitivity and a smaller deviation were achieved for emission method than for absorption method.Be-sides.the X-ray fluorescence method was comparable to scanningelectron microscopic method in terms of the measuring result,and the former had a smaller deviation and better reliability.
出处
《材料保护》
CAS
CSCD
北大核心
2010年第2期67-69,共3页
Materials Protection
