摘要
采用Pechini溶胶-凝胶法结合旋涂技术在单晶硅衬底上制备出了均匀、无裂纹的掺Tb3+的Lu2O3(Lu2O3:Tb)薄膜。用热重-差示扫描量热法分析了前驱体干凝胶在室温至1000℃下发生的热分解现象。利用X射线衍射和Fourier红外光谱和原子力显微镜研究了热处理温度对Lu2O3:Tb薄膜的晶相、化学组成和表面形貌的影响。结果表明:在550～1000℃间热处理的Lu2O3:Tb薄膜为多晶氧化镥立方结构,晶粒尺寸随温度升高而逐渐长大至30nm左右。在220nm紫外光激发下,Lu2O3:Tb薄膜呈现出较强的绿光发射,主发射峰分别位于542nm和551nm处。随着热处理温度的提高,Lu2O3:Tb薄膜中缺陷减少,发光强度增强。
Uniform and crack free Tb3＋ doped lutetium oxide （Lu2O3：Tb） films were prepared by Pechini sol-gel method combined with the spin-coating technique.The thermal decomposition behavior of the dried gel precursor from room temperature to 1 000 ℃ was analyzed by a thermogravimetry-differential scanning calorimetry.Effects of the heat-treatment temperature on the phase composition,structural characters and surface morphology of Lu2O3：Tb films were investigated by X-ray diffraction,Fourier transformed infrared spectroscopy and atomic force microscope.The results show that the films heat-treated between 550-1 000 ℃ have a Lu2O3 polycrystalline state with cubic structure,and its grain size grows to around 30 nm with the increasing of the temperature.The main luminescence emission peaks of Lu2O3：Tb films excited by a 220 nm light are located at 542 and 551 nm.With the raising of the annealing temperature,the defect in the Lu2O3：Tb films decreases and the luminescence emission intensity of films increases.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2010年第2期172-176,共5页
Journal of The Chinese Ceramic Society
基金
上海市自然科学基金(10ZR1411400)
2008年度高性能陶瓷和超微结构国家重点实验室开放基金(SKL200806SIC)
2008年上海大学创新基金资助项目
关键词
掺铽氧化镥薄膜
溶胶-凝胶法
形貌
发射光谱
terbium doped lutetium oxide film
sol-gel method
morphology
emission spectra
