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基于单轴气浮台摆动特性的调节平衡方法 被引量:7

Balance of Single Axis Air Bearing Table Based on Its Swing Characteristics
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摘要 单轴气浮台不平衡产生的阻力矩直接影响实验结果的真实性。手动调节的缺点是需采用多次测试反复调节。本研究提出一个有效的简化模型,并对模型进行力学分析,得到气浮台空气轴承的倾角大小和方向与其摆动特性的关系。由所得关系推出一种快捷有效的调节方法:控制空气轴承为微摆状态,测量气浮台调节前空气轴承的摆动周期和摆动静平衡位置;保证气浮台不发生变形,调节气浮台立柱的长度,控制空气轴承为微摆状态,测量气浮台调节后空气轴承的摆动周期和摆动静平衡位置的角度变化;求出空气轴承达到水平状态时各立柱所需调节的长度;根据计算结果调节各立柱的长度。实验验证了该调节方法的可行性。 The unbalance of the single axis air bearing table may affect the accuracy of experiment results. Common manual adjusting is time-consuming. This paper proposes a simple and effective model. Based on the mechanical analysis of the model, one may obtain the relationship between the obliquity of the turntable and the swing characteristics of the air bearing table. With a limited range of the air bearing table's swing, the air bearing table's swing periods and the static equilibrium position are measured before adjusting. Keeping the form of the air bearing table unchanged, the table's legs are adjusted in length. With a limited range of the air bearing table's swing, the air bearing table's swing periods and the change of the air bearing table's angle are measured to determine the length of each leg to be adjusted. The length of each leg is adjusted accordingly. This method is validated by experiment.
出处 《科技导报》 CAS CSCD 北大核心 2010年第2期46-49,共4页 Science & Technology Review
关键词 单轴气浮台 空气轴承 调平 转动力矩 single axis air bearing table balance moment
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