摘要
采用金属有机物热分解（ＭＯＤ）工艺在Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ衬底上制备锆钛酸铅（ＰＺＴ）薄膜．ＸＲＤ分析显示薄膜结晶状况良好，无焦绿石相存在．ＡＥＳ测量表明：薄膜成分沿膜厚均匀分布，膜中无碳存在，表面不富含铅．分析了薄膜的形成机理，定性地解释了晶粒的生长过程．
PZT thin films were prepared on Pt/Ti/SiO 2/Si(111) substrates by metallo_organic decomposition(MOD) technique. XRD analysis shows that the thin films possess good crystallinity, and no pyrochlore phase exists in thin films. It is found by AES measurement that the composition of the thin films is homogeneous, no carbon exists in thin films, and the surface of thin film is not lead_rich.The formation mechanism is discussed and the perovskite grain growth process is qualitatively explained in the paper.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
1998年第5期592-597,共6页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金
关键词
锆钛酸铅薄膜
热分解
MOD
铁电薄膜
PZT
陶瓷
lead zirconate titanate thin film, metallo_organic decomposition, formation mechanism, grain growth
